Open AccessA SACRIFICIAL-POLYMER-BASED TRENCH REFILL PROCESS FOR POST-DRIE SURFACE MICROMACHINING
Author(s) -
Christophe Courcimault,
Joseph Paul Jayachandran,
Paul A. Kohl,
S.A. Dibstrup-Allen,
Mark G. Allen
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.54
Subject(s) - materials science , deep reactive ion etching , surface micromachining , silicon , microfabrication , polymer , nanotechnology , bulk micromachining , microelectromechanical systems , optoelectronics , etching (microfabrication) , fabrication , composite material , reactive ion etching , layer (electronics) , medicine , alternative medicine , pathology
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