Open AccessA SACRIFICIAL-POLYMER-BASED TRENCH REFILL PROCESS FOR POST-DRIE SURFACE MICROMACHINING
Author(s) -
Christophe Courcimault,
Joseph Paul Jayachandran,
Paul A. Kohl,
S.A. Dibstrup-Allen,
Mark G. Allen
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.54
Subject(s) - surface micromachining , deep reactive ion etching , trench , materials science , process (computing) , polymer , fabrication , computer science , etching (microfabrication) , nanotechnology , composite material , reactive ion etching , medicine , alternative medicine , pathology , layer (electronics) , operating system