Open AccessSILICON CARBIDE FOR ENHANCED MEMS RELIABILITY
Author(s) -
Di Gao,
W. Robert Ashurst,
Carlo Carraro,
Roger T. Howe,
Roya Maboudian
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.52
Subject(s) - silicon carbide , microelectromechanical systems , reliability (semiconductor) , materials science , reliability engineering , silicon , computer science , optoelectronics , engineering , composite material , physics , power (physics) , quantum mechanics