Open AccessSILICON CARBIDE FOR ENHANCED MEMS RELIABILITY
Author(s) -
Di Gao,
W. Robert Ashurst,
Carlo Carraro,
Roger T. Howe,
Roya Maboudian
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.52
Subject(s) - stiction , materials science , microelectromechanical systems , cantilever , silicon carbide , layer (electronics) , substrate (aquarium) , coating , tribology , surface micromachining , composite material , silicon , thin film , adhesion , optoelectronics , nanotechnology , fabrication , medicine , oceanography , alternative medicine , pathology , geology
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