Open AccessULTRASONIC MICROINJECTION CHARACTERIZED BY INTEGRATED MICRO-OPTICAL FORCE ENCODER
Author(s) -
X. Zhang,
Stefan Zappe,
C. F. Quate,
Matthew Scott,
Olav Solgaard
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.50
Subject(s) - penetration (warfare) , materials science , microinjection , penetration depth , vibration , amplitude , injector , microelectromechanical systems , ultrasonic sensor , acoustics , optics , mechanics , optoelectronics , physics , mechanical engineering , engineering , operations research , medicine , endocrinology
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