Open AccessULTRASONIC MICROINJECTION CHARACTERIZED BY INTEGRATED MICRO-OPTICAL FORCE ENCODER
Author(s) -
X. Zhang,
S. Zappe,
C. F. Quate,
Matthew P. Scott,
Olav Solgaard
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.50
Subject(s) - encoder , microinjection , ultrasonic sensor , rotary encoder , computer science , transducer , materials science , acoustics , physics , operating system , medicine , endocrinology