Open AccessA LOW-POWER, LOW-LEAKAGE, BI-STABLE PLANAR ELECTROLYSIS MICRO GATE VALVE
Author(s) -
Jeremy A. Frank,
A.P. Pisano
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.43
Subject(s) - gate valve , wafer , fluidics , materials science , leakage (economics) , fabrication , optoelectronics , silicon , planar , inert , electrolysis , microfluidics , electrical engineering , nanotechnology , mechanical engineering , computer science , engineering , electrode , chemistry , computer graphics (images) , electrolyte , economics , macroeconomics , medicine , alternative medicine , organic chemistry , pathology
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