Open AccessMAGNETIC INDUCTION MACHINES EMBEDDED IN FUSION-BONDED SILICON
Author(s) -
David P. Arnold,
F. Cros,
Suman Das,
I. Zana,
J.H. Lang,
Mark G. Allen
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.36
Subject(s) - fabrication , silicon , electroplating , materials science , torque , fusion , power density , power (physics) , electrical engineering , optoelectronics , composite material , engineering , physics , thermodynamics , linguistics , philosophy , medicine , alternative medicine , pathology , layer (electronics)
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