Open AccessMAGNETIC INDUCTION MACHINES EMBEDDED IN FUSION-BONDED SILICON
Author(s) -
David P. Arnold,
F. Cros,
Iulica Zana,
Mark G. Allen,
Subhro Das,
Jeffrey H. Lang
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.36
Subject(s) - silicon , fusion , materials science , computer science , optoelectronics , linguistics , philosophy