THE WIMS CUBE: A MICROSYSTEM PACKAGE WITH ACTUATED FLEXIBLE CONNECTIONS AND RE-WORKABLE ASSEMBLY
Author(s) -
A.B. Ucok,
J.M. Giachino,
K. Najafi
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.33
Subject(s) - microsystem , actuator , fluidics , parylene , resistive touchscreen , microelectromechanical systems , comb drive , materials science , electrical engineering , deflection (physics) , cube (algebra) , mechanical engineering , optoelectronics , acoustics , engineering , nanotechnology , fabrication , composite material , mathematics , combinatorics , medicine , alternative medicine , physics , optics , pathology , polymer
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