Open AccessTHE WIMS CUBE: A MICROSYSTEM PACKAGE WITH ACTUATED FLEXIBLE CONNECTIONS AND RE-WORKABLE ASSEMBLY
Author(s) -
A.B. Ucok,
J.M. Giachino,
K. Najafi
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.33
Subject(s) - microsystem , cube (algebra) , computer science , materials science , nanotechnology , mathematics , combinatorics