Open AccessRF MEMS SWITCHES USING COPPER-BASED CMOS INTERCONNECT MANUFACTURING TECHNOLOGY
Author(s) -
Nils Høivik,
C. Jahnes,
J. Cotte,
Jennifer L. Lund,
David E. Seeger,
J. H. Magerlein
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.24
Subject(s) - interconnection , microelectromechanical systems , rf switch , materials science , cmos , fabrication , electrical engineering , insertion loss , voltage , crossover switch , radio frequency , electrical conductor , optoelectronics , electronic engineering , computer science , engineering , optical switch , telecommunications , medicine , alternative medicine , pathology
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