Open AccessRF MEMS SWITCHES USING COPPER-BASED CMOS INTERCONNECT MANUFACTURING TECHNOLOGY
Author(s) -
Nils Høivik,
C. Jahnes,
J. Cotte,
Jennifer L. Lund,
David E. Seeger,
J. H. Magerlein
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.24
Subject(s) - interconnection , microelectromechanical systems , cmos , copper , electronic engineering , materials science , computer science , optoelectronics , engineering , telecommunications , metallurgy