Open AccessREDUCTION IN THERMOELASTIC DISSIPATION IN MICROMECHANICAL RESONATORS BY DISRUPTION OF HEAT TRANSPORT
Author(s) -
Robert Candler,
W.-T. Park,
Saurabh A. Chandorkar,
G. Yama,
Kenneth E. Goodson,
Varghese Mathai,
Amy Duwel,
Aaron Partridge,
M. Lutz,
Thomas W. Kenny
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.11
Subject(s) - thermoelastic damping , dissipation , resonator , reduction (mathematics) , thermal management of electronic devices and systems , materials science , mechanics , thermal , mechanical engineering , physics , optoelectronics , thermodynamics , engineering , geometry , mathematics