REDUCTION IN THERMOELASTIC DISSIPATION IN MICROMECHANICAL RESONATORS BY DISRUPTION OF HEAT TRANSPORT
Author(s) -
Rob N. Candler,
M. A,
W.-T. Park,
Saurabh A. Chandorkar,
G. Yama,
Kenneth E. Goodson,
M. Varghese,
Amy Duwel,
Aaron Partridge,
M. Lutz,
Thomas W. Kenny
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.11
Subject(s) - thermoelastic damping , dissipation , reduction (mathematics) , resonator , thermal management of electronic devices and systems , materials science , acoustics , thermal , physics , mechanical engineering , optoelectronics , engineering , thermodynamics , mathematics , geometry
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