Open Access18µM THICK HIGH FREQUENCY CAPACITIVE HARPSS RESONATORS WITH REDUCED MOTIONAL RESISTANCE
Author(s) -
Siavash Pourkamali,
Farrokh Ayazi
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.104
Subject(s) - capacitive sensing , resonator , materials science , electrical engineering , optoelectronics , acoustics , physics , engineering