Open Access18µM THICK HIGH FREQUENCY CAPACITIVE HARPSS RESONATORS WITH REDUCED MOTIONAL RESISTANCE
Author(s) -
Siavash Pourkamali,
Farrokh Ayazi
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.104
Subject(s) - resonator , materials science , capacitive sensing , electrode , q factor , optoelectronics , silicon on insulator , silicon , electrical engineering , physics , engineering , quantum mechanics
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