Open AccessMEASUREMENT OF TRANSIENT THERMAL RESPONSE OF MICRO-MIRRORS
Author(s) -
Craig R. Forest,
P. Reynold-Browne,
Olga Blum-Spahn,
C. Channy Wong,
James G. Harris,
Erik Novak,
S. A. Mani,
F. Peter,
Dolph O. Adams
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.101
Subject(s) - materials science , transient (computer programming) , optics , interferometry , deformation (meteorology) , thermal , thermography , transient response , microelectromechanical systems , amplitude , metrology , laser , infrared , optoelectronics , composite material , physics , operating system , meteorology , electrical engineering , computer science , engineering
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