Open AccessTOWARDS INERTIAL GRADE VIBRATORY MICROGYROS: A HIGH-Q IN-PLANE SILICON-ON-INSULATOR TUNING FORK DEVICE
Author(s) -
M.F. Zaman,
Ajit Sharma,
B.V. Amini,
Farrokh Ayazi
Publication year - 2004
Publication title -
2004 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.100
Subject(s) - tuning fork , silicon on insulator , fork (system call) , silicon , materials science , optoelectronics , inertial frame of reference , plane (geometry) , physics , electrical engineering , acoustics , computer science , engineering , mechanical engineering , vibration , mathematics , geometry , quantum mechanics