Open AccessTOWARDS INERTIAL GRADE VIBRATORY MICROGYROS: A HIGH-Q IN-PLANE SILICON-ON-INSULATOR TUNING FORK DEVICE
Author(s) -
Mohammad F. Zaman,
Ajit Sharma,
B.V. Amini,
Farrokh Ayazi
Publication year - 2004
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2004.100
Subject(s) - tuning fork , silicon on insulator , gyroscope , inertial frame of reference , sense (electronics) , decoupling (probability) , bandwidth (computing) , silicon , physics , optoelectronics , electrical engineering , materials science , electronic engineering , engineering , computer science , acoustics , telecommunications , control engineering , quantum mechanics , vibration
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