Open Access1200 Mirror Array Integrated with CMOS for Photonic Switching: Application of Mechanical Leveraging and Torsional Electrostatic Actuation to Reduce Drive Voltage Requirements and Increase Angular Tilt
Author(s) -
J. H. Smith,
Steven Nasiri,
Janusz Bryzek,
Mitchell J. Novack,
Justin Starr,
Hee-jun Kwon,
Anthony F. Flannery,
David Marx,
Z. Chen,
E. Sigari
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.97
Subject(s) - tilt (camera) , voltage , materials science , photonics , cmos , optoelectronics , comb drive , optical switch , electrical engineering , engineering , mechanical engineering , fabrication , medicine , alternative medicine , pathology