Open Access1200 Mirror Array Integrated with CMOS for Photonic Switching: Application of Mechanical Leveraging and Torsional Electrostatic Actuation to Reduce Drive Voltage Requirements and Increase Angular Tilt
Author(s) -
J. H. Smith,
Steven Nasiri,
Janusz Bryzek,
Mitchell J. Novack,
J. B. Starr,
Hee-jun Kwon,
Anthony F. Flannery,
David Marx,
Z. Chen,
E. Sigari
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.97
Subject(s) - optical switch , actuator , tilt (camera) , photonics , voltage , port (circuit theory) , comb drive , fabrication , amplifier , electrical engineering , cmos , engineering , materials science , electronic engineering , optoelectronics , mechanical engineering , medicine , alternative medicine , pathology
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