Open AccessSelf-Assembled Out-of-Plane High Q Inductors
Author(s) -
C.L. Chua,
D. K. Fork,
Koenraad Van Schuylenbergh,
Jinzhong Lu
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.94
Subject(s) - inductor , plane (geometry) , materials science , electrical engineering , engineering , geometry , mathematics , voltage
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