Open AccessHigh Voltage Limits for Electrostatic Transducers: On the Role of Ambient Pressure and Device Dimension in MicroDischarges
Author(s) -
C.G. Wilson,
A. Wendt,
Yogesh B. Gianchandani
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.93
Subject(s) - cathode , anode , voltage , planar , materials science , pressure sensor , glow discharge , optoelectronics , transducer , electrode , electrical engineering , acoustics , chemistry , physics , plasma , computer science , engineering , computer graphics (images) , quantum mechanics , thermodynamics
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