Open AccessNanoelectromechanical Silicon Carbide Resonators for Ultra High Frequency Applications
Author(s) -
Xuefei Huang,
K. L. Ekinci,
Yunfan Yang,
Christian A. Zorman,
Mehran Mehregany,
M. L. Roukes
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.92
Subject(s) - resonator , materials science , surface micromachining , optoelectronics , electron beam lithography , silicon carbide , microelectromechanical systems , nanoelectromechanical systems , ultra high frequency , wide bandgap semiconductor , electrical engineering , nanotechnology , resist , fabrication , engineering , composite material , nanomedicine , nanoparticle , medicine , alternative medicine , pathology , layer (electronics)
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