Open AccessNanoelectromechanical Silicon Carbide Resonators for Ultra High Frequency Applications
Author(s) -
Xinyue Huang,
K. L. Ekinci,
Yunyan Yang,
C.A. Zorman,
Mehran Mehregany,
M. L. Roukes
Publication year - 2002
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.92
Subject(s) - silicon carbide , resonator , materials science , nanoelectromechanical systems , silicon , optoelectronics , wide bandgap semiconductor , nanotechnology , metallurgy , nanoparticle , nanomedicine