Open AccessA Low-Voltage Tiltable Microplatform using Bent-Beam Actuation
Author(s) -
Yuan Xie,
C.T.-C. Nguyen
Publication year - 2002
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.87
Subject(s) - bent molecular geometry , voltage , materials science , beam (structure) , optics , electrical engineering , optoelectronics , physics , engineering , composite material