Open AccessA Low-Voltage Tiltable Microplatform using Bent-Beam Actuation
Author(s) -
Yuan Xie,
Clark T.C. Nguyen
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.87
Subject(s) - bent molecular geometry , tilt (camera) , actuator , beam (structure) , voltage , materials science , resonance (particle physics) , optics , substrate (aquarium) , optoelectronics , electrical engineering , engineering , physics , mechanical engineering , composite material , oceanography , particle physics , geology
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