
Micromachined Variable Capacitor with Wide Tuning Range
Author(s) -
Zhi Hong Xiao,
Wuyong Peng,
R.F. Wolffenbuttel,
K. Farmer
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.86
Subject(s) - capacitor , variable capacitor , variable (mathematics) , range (aeronautics) , materials science , computer science , optoelectronics , electrical engineering , electronic engineering , voltage , engineering , composite material , mathematical analysis , mathematics