Open AccessMicromachined Variable Capacitor with Wide Tuning Range
Author(s) -
Zhi Hong Xiao,
Wuyong Peng,
R.F. Wolffenbuttel,
K.R. Farmer
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.86
Subject(s) - capacitor , wafer , silicon on insulator , deep reactive ion etching , capacitance , materials science , variable capacitor , fabrication , optoelectronics , silicon , voltage , variable (mathematics) , range (aeronautics) , electrical engineering , nanotechnology , etching (microfabrication) , engineering , physics , composite material , mathematics , mathematical analysis , reactive ion etching , alternative medicine , pathology , layer (electronics) , quantum mechanics , medicine , electrode
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