Batch Fabricated Inline Microfluidic Valve
Author(s) -
P.R. Selvaganapathy,
Edwin T. Carlen,
Carlos H. Mastrangelo
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.79
Subject(s) - microfluidics , materials science , fabrication , valve actuator , optoelectronics , needle valve , process (computing) , fluidics , control valves , nanotechnology , globe valve , mechanical engineering , electrical engineering , actuator , engineering , computer science , medicine , alternative medicine , pathology , operating system
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