Open AccessAngular Rate Gyroscope with Dual Anchor Support
Author(s) -
G.J. O'Brien,
David J. Monk,
K. Najafi
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.71
Subject(s) - proof mass , cantilever , deflection (physics) , gyroscope , torsion (gastropod) , torsion spring , physics , bandwidth (computing) , capacitance , optics , sense (electronics) , vibrating structure gyroscope , stiction , acoustics , materials science , structural engineering , microelectromechanical systems , electrical engineering , computer science , classical mechanics , optoelectronics , engineering , vibration , medicine , computer network , surgery , quantum mechanics , electrode
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