A Novel MEMS Tunable Capacitor based on Angular Vertical Comb Drive Actuators | Zendy

Hoang-Sy Nguyen | Zendy; Dooyoung Hah | Zendy; Pamela Patterson | Zendy; Ru-Min Chao | Zendy; Wibool Piyawattanametha | Zendy; Michael Wu | Zendy

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A Novel MEMS Tunable Capacitor based on Angular Vertical Comb Drive Actuators

Author(s) -

Hoang-Sy Nguyen,

Dooyoung Hah,

Pamela Patterson,

Ru-Min Chao,

Wibool Piyawattanametha,

Michael Wu

Publication year - 2002

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh2002.69

Subject(s) - photoresist , microelectromechanical systems , fabrication , materials science , actuator , deep reactive ion etching , optoelectronics , capacitor , comb drive , etching (microfabrication) , capacitance , substrate (aquarium) , rotation (mathematics) , reactive ion etching , resist , layer (electronics) , nanotechnology , electrical engineering , computer science , electrode , engineering , voltage , physics , alternative medicine , pathology , medicine , artificial intelligence , oceanography , quantum mechanics , geology

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