Open AccessA Novel MEMS Tunable Capacitor based on Angular Vertical Comb Drive Actuators
Author(s) -
Hoang-Nam Nguyen,
Dooyoung Hah,
P.R. Patterson,
Ru-Min Chao,
Wibool Piyawattanametha,
Michael Wu
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.69
Subject(s) - comb drive , actuator , microelectromechanical systems , capacitor , materials science , electrical engineering , optoelectronics , engineering , voltage , fabrication , medicine , alternative medicine , pathology