Open AccessMultielectrode Microprobes for Deep-Brain Stimulation Fabricated using a Novel 3-D Shaping Electroplating Process
Author(s) -
P.S. Motta,
Jack W. Judy
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.68
Subject(s) - microelectrode , materials science , electroplating , electrode , multielectrode array , electrical impedance , silicon nitride , biomedical engineering , deep brain stimulation , optoelectronics , electrode array , stiffness , silicon , brain tissue , microfabrication , composite material , electrical engineering , fabrication , layer (electronics) , engineering , chemistry , medicine , disease , pathology , parkinson's disease , alternative medicine
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