Open AccessPrecision Fabrication of High-Speed Micro-Rotors using Deep Reactive Ion Etching (DRIE)
Author(s) -
Norihisa Miki,
C. J. Teo,
L. C. Ho,
X. Zhang
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.66
Subject(s) - deep reactive ion etching , fabrication , etching (microfabrication) , reactive ion etching , materials science , optoelectronics , ion , nanotechnology , chemistry , medicine , alternative medicine , layer (electronics) , pathology , organic chemistry