Open AccessPrecision Fabrication of High-Speed Micro-Rotors using Deep Reactive Ion Etching (DRIE)
Author(s) -
Norihisa Miki,
Chiang Juay Teo,
L. C. Ho,
Xiaoge Zhang
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.66
Subject(s) - deep reactive ion etching , wafer , fabrication , etching (microfabrication) , rotor (electric) , materials science , reactive ion etching , silicon , optoelectronics , nanotechnology , mechanical engineering , engineering , medicine , alternative medicine , layer (electronics) , pathology
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