Open AccessA High Tuning-Ratio Silicon-Micromachined Variable Capacitor with Low Driving Voltage
Author(s) -
Zhihong Li,
Norman C. Tien
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.60
Subject(s) - capacitor , variable capacitor , silicon , variable (mathematics) , materials science , voltage , surface micromachining , optoelectronics , electrical engineering , electronic engineering , engineering , fabrication , medicine , alternative medicine , pathology , mathematical analysis , mathematics