Open AccessA High Tuning-Ratio Silicon-Micromachined Variable Capacitor with Low Driving Voltage
Author(s) -
Zhenhao Li,
N.C. Tien
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.60
Subject(s) - capacitor , variable capacitor , materials science , capacitance , comb drive , voltage , surface micromachining , actuator , footprint , silicon , optoelectronics , sensitivity (control systems) , electrical engineering , electronic engineering , engineering , electrode , fabrication , physics , medicine , alternative medicine , pathology , paleontology , quantum mechanics , biology
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