Open AccessChemical and Biological Diagnostics using Fully Insulated Ultracompliant Thermal Probes
Author(s) -
M.-H. Li,
J.-H. Lee,
F. Cerrina,
Ankitha Me,
Yogesh B. Gianchandani
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.59
Subject(s) - fabrication , materials science , image resolution , resolution (logic) , thermal , optoelectronics , nanoscopic scale , polymer , temperature measurement , integrated circuit , nanotechnology , optics , analytical chemistry (journal) , chemistry , composite material , computer science , physics , medicine , alternative medicine , pathology , quantum mechanics , chromatography , artificial intelligence , meteorology
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