Open AccessHigh-Frequency Actuation with Silicon Electroosmotic Micropumps
Author(s) -
Daniel Laser,
K.E. Goodson,
Juan G. Santiago,
Thomas W. Kenny
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.58
Subject(s) - micropump , microscale chemistry , silicon , materials science , microfluidics , fluidics , surface micromachining , bulk micromachining , comb drive , microelectromechanical systems , optoelectronics , pressure sensor , nanotechnology , fabrication , mechanical engineering , electrical engineering , engineering , medicine , alternative medicine , pathology , mathematics education , mathematics
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