Open AccessHigh-Frequency Actuation with Silicon Electroosmotic Micropumps
Author(s) -
Daniel Laser,
K.E. Goodson,
Juan G. Santiago,
Thomas W. Kenny
Publication year - 2002
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.58
Subject(s) - silicon , microfluidics , materials science , actuator , comb drive , optoelectronics , electrical engineering , engineering , nanotechnology , fabrication , medicine , alternative medicine , pathology