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A 5V Closed-Loop Second-Order Sigma-Delta Micro-g Microaccelerometer
Author(s) -
H. Kulah,
A. Salian,
N. Yazdi,
Kobra Najafi
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.55
Subject(s) - accelerometer , capacitive sensing , offset (computer science) , loop (graph theory) , noise floor , noise (video) , delta sigma modulation , cantilever , cmos , signal (programming language) , electrical engineering , acoustics , physics , control theory (sociology) , engineering , noise reduction , noise measurement , computer science , mathematics , structural engineering , control (management) , quantum mechanics , combinatorics , artificial intelligence , image (mathematics) , programming language

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