Open AccessInfrared Diagnostics for Measuring Fluid and Solid Motion Inside MEMS
Author(s) -
Gengxin Han,
James Bird,
K. Johan,
A. Westin,
Kenneth Breuer
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.47
Subject(s) - microelectromechanical systems , infrared , fluid motion , motion (physics) , computer science , materials science , optics , optoelectronics , physics , computer vision , mechanics