Open AccessInfrared Diagnostics for Measuring Fluid and Solid Motion Inside MEMS
Author(s) -
Gengxin Han,
James Bird,
K. Johan,
A. Westin,
Kenneth Breuer
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.47
Subject(s) - opacity , microelectromechanical systems , wavelength , silicon , optics , materials science , infrared , particle image velocimetry , position (finance) , velocimetry , optoelectronics , acoustics , physics , mechanics , turbulence , finance , economics
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