Open AccessElectrical Through Wafer Interconnects with 0.05 Pico Farads Parasitic Capacitance on 400µm Thick Silicon Substrate
Author(s) -
Chor Hing Cheng,
A.S. Ergun,
B.T. Khuri-Yakub
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.40
Subject(s) - wafer , parasitic capacitance , capacitance , substrate (aquarium) , silicon , materials science , optoelectronics , parasitic extraction , electrical engineering , electronic engineering , engineering , physics , electrode , quantum mechanics , oceanography , geology