Open AccessWafer Level Anti-Stiction Coatings with Superior Thermal Stability
Author(s) -
W. Robert Ashurst,
Carlo Carraro,
Roya Maboudian,
W Frey
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.36
Subject(s) - monolayer , stiction , wafer , chemistry , chemical vapor deposition , substrate (aquarium) , thermal stability , chemical engineering , coating , deposition (geology) , nanotechnology , materials science , analytical chemistry (journal) , organic chemistry , microelectromechanical systems , engineering , paleontology , oceanography , sediment , biology , geology
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