Open AccessLow Voltage MEMS Analog Micromirror Arrays with Hidden Vertical Comb-Drive Actuators
Author(s) -
Dooyoung Hah,
ShiangSuo Huang,
Hung D. Nguyen,
Houchen Chang,
Jui-che Tsai,
Hiroshi Toshiyoshi,
M.C. Wu
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.3
Subject(s) - comb drive , microelectromechanical systems , actuator , digital micromirror device , voltage , materials science , optics , optoelectronics , electrical engineering , physics , engineering , fabrication , medicine , alternative medicine , pathology