Open AccessLow Voltage MEMS Analog Micromirror Arrays with Hidden Vertical Comb-Drive Actuators
Author(s) -
Dooyoung Hah,
ShiangSuo Huang,
Hung D. Nguyen,
Houchen Chang,
Jui-che Tsai,
Hiroshi Toshiyoshi,
Ming C. Wu
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.3
Subject(s) - actuator , microelectromechanical systems , comb drive , materials science , optics , voltage , wavelength , surface micromachining , multiplexing , wavelength division multiplexing , optical switch , optoelectronics , deformable mirror , adaptive optics , physics , electrical engineering , fabrication , engineering , medicine , alternative medicine , pathology
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