Open AccessA Barometric Pressure Sensor with Integrated Reference Pressure Control using Localized CVD
Author(s) -
P.P.L. Chang-Chien,
K.D. Wise
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.23
Subject(s) - atmospheric pressure , pressure measurement , pressure control , pressure sensor , computer science , engineering , physics , mechanical engineering , meteorology