Open AccessA Barometric Pressure Sensor with Integrated Reference Pressure Control using Localized CVD
Author(s) -
P.P.L. Chang-Chien,
K.D. Wise
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.23
Subject(s) - getter , wafer , torr , materials science , pressure measurement , pressure sensor , atmospheric pressure , optoelectronics , resonator , chemical vapor deposition , mechanical engineering , physics , oceanography , thermodynamics , geology , engineering
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