Open AccessRobot Leg Motion in a Planarized-SOI, 2 Poly Process
Author(s) -
S. Hollar,
Anita M. Flynn,
Sarah Bergbreiter,
Kristofer S. J. Pister
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.14
Subject(s) - silicon on insulator , materials science , hinge , robot , actuator , substrate (aquarium) , optoelectronics , layer (electronics) , computer science , mechanical engineering , electrical engineering , nanotechnology , silicon , engineering , artificial intelligence , oceanography , geology
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