Open AccessRobot Leg Motion in a Planarized-SOI, 2 Poly Process
Author(s) -
S. Hollar,
Anita M. Flynn,
Sarah Bergbreiter,
Kristofer S. J. Pister
Publication year - 2002
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.14
Subject(s) - robot , silicon on insulator , process (computing) , computer science , motion (physics) , materials science , artificial intelligence , optoelectronics , silicon , operating system