Open AccessHydraulic Amplification Devices for Microscale Actuation
Author(s) -
Jacques Steyn,
H.Q. Li,
David C. Roberts,
Kevin T. Turner,
Onnik Yaglioglu,
Yufeng Su,
Richard Mlcak,
M.A. Schmidt,
S.M. Spearing,
Nesbitt W. Hagood
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.13
Subject(s) - microscale chemistry , actuator , amplifier , microelectromechanical systems , piezoelectricity , stroke (engine) , fabrication , materials science , hydraulic machinery , mechanical engineering , work (physics) , acoustics , electrical engineering , engineering , optoelectronics , cmos , physics , composite material , mathematics education , mathematics , medicine , alternative medicine , pathology
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