Open AccessA Low Temperature Bi-CMOS Compatible Process for MEMS RF Resonators and Filters
Author(s) -
Jennifer L. Lund,
C. Jahnes,
H. Deligianni,
L.P. Buchwalter,
J. Cotte,
P. C. Andricacos,
David E. Seeger,
J.H. Magerlein
Publication year - 2002
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.10
Subject(s) - resonator , microelectromechanical systems , materials science , cmos , electronic engineering , band pass filter , radio frequency , optoelectronics , process (computing) , electrical engineering , computer science , engineering , operating system