Open AccessA Low Temperature Bi-CMOS Compatible Process for MEMS RF Resonators and Filters
Author(s) -
Jennifer L. Lund,
C. Jahnes,
H. Deligianni,
L.P. Buchwalter,
J. Cotte,
P. C. Andricacos,
David E. Seeger,
J.H. Magerlein
Publication year - 2002
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2002.10
Subject(s) - resonator , materials science , microelectromechanical systems , cmos , fabrication , optoelectronics , wafer , q factor , radio frequency , electrical engineering , electronic engineering , engineering , medicine , alternative medicine , pathology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom