Open AccessA MEMS 2-D Scanner with Bonded Single-Crystalline Honeycomb Micromirror
Author(s) -
Phillip Patterson,
Dangqin Jin,
Hiroshi Toshiyoshi,
Menglu Wu
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000a.9
Subject(s) - scanner , materials science , microelectromechanical systems , fabrication , silicon on insulator , honeycomb , silicon , honeycomb structure , optics , optoelectronics , curvature , surface roughness , crystalline silicon , composite material , physics , medicine , alternative medicine , geometry , mathematics , pathology
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