Open AccessA MEMS 2-D Scanner with Bonded Single-Crystalline Honeycomb Micromirror
Author(s) -
Phillip Patterson,
Hiroshi Toshiyoshi,
Menglu Wu
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000a.9
Subject(s) - microelectromechanical systems , scanner , honeycomb , materials science , optics , optoelectronics , physics , composite material