Open AccessFerromagnetic Micromechanical Magnetometers
Author(s) -
Jack W. Judy,
H. Uang,
Nosang V. Myung,
P. Irazoqui-Pasotr,
Martin A. Schwartz,
Kohei Nobe,
Ke-Luen Yang
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000a.8
Subject(s) - magnetometer , materials science , electroplating , scaling , ferromagnetism , surface micromachining , nanosensor , microelectromechanical systems , optoelectronics , electronic engineering , condensed matter physics , magnetic field , nanotechnology , physics , engineering , fabrication , medicine , geometry , mathematics , alternative medicine , layer (electronics) , pathology , quantum mechanics
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