Open AccessLinearization and Analysis of Electrostatically Actuated MEMS 2D Opitcal Scanner
Author(s) -
H. Toshiuoshi,
Wibool Piyawattanametha,
C-H.T. Chan,
M.C. Wu
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000a.4
Subject(s) - microelectromechanical systems , scanner , linearization , control theory (sociology) , computer science , control engineering , materials science , engineering , physics , nonlinear system , nanotechnology , artificial intelligence , control (management) , quantum mechanics