Open AccessLinearization and Analysis of Electrostatically Actuated MEMS 2D Opitcal Scanner
Author(s) -
H. Toshiuoshi,
Wibool Piyawattanametha,
C-H.T. Chan,
Ming C. Wu
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000a.4
Subject(s) - scanner , microelectromechanical systems , linearization , computer science , control theory (sociology) , engineering , electrical engineering , physics , nonlinear system , artificial intelligence , optoelectronics , control (management) , quantum mechanics
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