Open AccessSurface/Bulk Micromachined High Performance Silicon Micro-Syroscope
Author(s) -
D. Cho,
A. Lee,
S. Park
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000a.1
Subject(s) - materials science , gyroscope , surface micromachining , bulk micromachining , wafer , capacitive sensing , microelectromechanical systems , air gap (plumbing) , optoelectronics , silicon , noise (video) , etching (microfabrication) , electronic engineering , fabrication , electrical engineering , nanotechnology , composite material , computer science , medicine , alternative medicine , pathology , physics , image (mathematics) , quantum mechanics , layer (electronics) , artificial intelligence , engineering
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