Open AccessSurface/Bulk Micromachined High Performance Silicon Micro-Syroscope
Author(s) -
D. Cho,
A. Lee,
S. Park
Publication year - 2000
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000a.1
Subject(s) - silicon , materials science , surface micromachining , optoelectronics , surface (topology) , nanotechnology , fabrication , medicine , alternative medicine , geometry , mathematics , pathology