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Nanoelectromechanical Systems
Author(s) -
M.L. Roukes
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.89
Subject(s) - nanoelectromechanical systems , microelectromechanical systems , actuator , nanotechnology , nanorobotics , usable , computer science , materials science , electronic engineering , electrical engineering , engineering , nanomedicine , nanoparticle , world wide web

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