Open AccessActive Frequency Tuning for Microresonators by Localized Thermal Stressing Effects
Author(s) -
Todd Remtema,
Liwei Lin
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.88
Subject(s) - resonator , materials science , microelectromechanical systems , gyroscope , thermal , cantilever , frequency response , joule heating , optoelectronics , acoustics , electronic engineering , physics , electrical engineering , engineering , meteorology , quantum mechanics , composite material
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