Open AccessUnderstanding Parametric Resonance Effects in Common MEM Actuators
Author(s) -
Kimberly L. Turner,
Noel C. MacDonald
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.87
Subject(s) - parametric statistics , actuator , parametric oscillator , resonance (particle physics) , microelectromechanical systems , resonator , position (finance) , control theory (sociology) , amplitude , acoustics , comb drive , computer science , physics , optics , optoelectronics , mathematics , atomic physics , control (management) , artificial intelligence , statistics , medicine , alternative medicine , finance , pathology , fabrication , economics
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