Open AccessMeshless Techniques for Efficient Simulation of Nonlinear Behavior in Electrostatic MEMS
Author(s) -
G. Li,
N. R. Aluru
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.85
Subject(s) - nonlinear system , microelectromechanical systems , computer science , linearity , finite element method , linear model , macro , mathematics , electronic engineering , engineering , physics , materials science , machine learning , structural engineering , nanotechnology , quantum mechanics , programming language
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