Open AccessMeshless Techniques for Efficient Simulation of Nonlinear Behavior in Electrostatic MEMS
Author(s) -
G. Li,
Narayan Aluru
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.85
Subject(s) - microelectromechanical systems , nonlinear system , computer science , nonlinear dynamical systems , computational science , materials science , physics , nanotechnology , quantum mechanics