Open AccessThrough-Wafer Electrical Interconnects Compatible with Standard Semiconductor Processing
Author(s) -
Eugene M. Chow,
Aaron Partridge,
C. F. Quate,
Thomas W. Kenny
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.83
Subject(s) - wafer , semiconductor , materials science , optoelectronics , wafer scale integration , semiconductor device , electronic engineering , computer science , engineering , composite material , layer (electronics)