Open AccessThrough-Wafer Electrical Interconnects Compatible with Standard Semiconductor Processing
Author(s) -
Eugene M. Chow,
Aaron Partridge,
C. F. Quate,
Thomas W. Kenny
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.83
Subject(s) - wafer , materials science , optoelectronics , capacitance , fabrication , doping , semiconductor , silicon , deposition (geology) , electronic engineering , engineering , electrode , chemistry , medicine , paleontology , alternative medicine , pathology , sediment , biology
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