Open AccessIn-Situ MicroPlasmas for Rapid Dry Etching of Silicon
Author(s) -
Curtis M. Wilson,
Yogesh B. Gianchandani
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.81
Subject(s) - etching (microfabrication) , dry etching , silicon , in situ , materials science , optoelectronics , nanotechnology , chemistry , organic chemistry , layer (electronics)