Open AccessMEMS Thermal Shear-Stress Sensors: Experiments, Theory and Modeling
Author(s) -
Qiao Lin,
Feifei Jiang,
X.-Q. Wang,
Zhigang Han,
YuanChuan Tai,
J. Lew,
ChihMing Ho
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.74
Subject(s) - microelectromechanical systems , thermal , shear stress , stress (linguistics) , heat transfer , shear (geology) , computer science , mechanical engineering , electronic engineering , materials science , engineering , mechanics , physics , nanotechnology , linguistics , philosophy , composite material , meteorology
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