Open AccessMEMS Thermal Shear-Stress Sensors: Experiments, Theory and Modeling
Author(s) -
Qiao Lin,
Feifei Jiang,
X.-Q. Wang,
Zhigang Han,
YuChong Tai,
J. Lew,
ChihMing Ho
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.74
Subject(s) - microelectromechanical systems , shear stress , stress (linguistics) , thermal , materials science , shear (geology) , physics , optoelectronics , composite material , thermodynamics , linguistics , philosophy