Open AccessHigh Sensitivity MEMS Ultrasound Arrays by Lateral Ferroelectric Polarization
Author(s) -
J. Bernstein,
J. Bottari,
K. Houston,
G. Kirkos,
Raanan A. Miller,
Baomin Xu,
Y. Ye,
L. E. Cross
Publication year - 2000
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.68
Subject(s) - microelectromechanical systems , ferroelectricity , materials science , sensitivity (control systems) , polarization (electrochemistry) , optoelectronics , acoustics , electronic engineering , engineering , physics , chemistry , dielectric