Open AccessHigh Sensitivity MEMS Ultrasound Arrays by Lateral Ferroelectric Polarization
Author(s) -
Jonathan Bernstein,
J. Bottari,
K. Houston,
G. Kirkos,
Raanan A. Miller,
Baomin Xu,
Y. Ye,
L. E. Cross
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.68
Subject(s) - materials science , ferroelectricity , capacitance , transducer , sensitivity (control systems) , microelectromechanical systems , equivalent circuit , polarization (electrochemistry) , finite element method , optoelectronics , wafer , acoustics , electronic engineering , electrical engineering , voltage , engineering , electrode , dielectric , chemistry , physics , structural engineering
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom