Open AccessScanning Microlens Shuttles Fabricated using Silicon-On-Insulator Wafers
Author(s) -
Dao Heng Sun,
Chingwei Yeh,
María Félix Rosa
Publication year - 2000
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.63
Subject(s) - microlens , wafer , silicon on insulator , materials science , silicon , optoelectronics , insulator (electricity) , optics , lens (geology) , physics