Open AccessScanning Microlens Shuttles Fabricated using Silicon-On-Insulator Wafers
Author(s) -
Daoheng Sun,
Chun-Yi Yeh,
María Félix Rosa
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.63
Subject(s) - microlens , silicon on insulator , materials science , wafer , silicon , optoelectronics , optics , photoresist , lens (geology) , focal length , layer (electronics) , nanotechnology , physics
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