Open AccessMEMS-based Variable Capacitor for Millimeter-Wave Applications
Author(s) -
Zhichao Feng,
H. Zhang,
Wei Zhang,
Bo Su,
Kirti Gupta,
Victor M. Bright,
Y.-C. Lee
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.62
Subject(s) - microelectromechanical systems , variable capacitor , capacitor , capacitance , coplanar waveguide , materials science , extremely high frequency , millimeter , actuator , optoelectronics , electrical engineering , capacitance probe , radio frequency , engineering , physics , optics , voltage , microwave , telecommunications , electrode , quantum mechanics
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