Open AccessMEMS-based Variable Capacitor for Millimeter-Wave Applications
Author(s) -
Zhichao Feng,
H. Zhang,
W. Zhang,
Bo Su,
Kirti Gupta,
Victor M. Bright,
Y.-C. Lee
Publication year - 2000
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.62
Subject(s) - microelectromechanical systems , capacitor , variable capacitor , extremely high frequency , variable (mathematics) , millimeter , computer science , electrical engineering , materials science , optoelectronics , engineering , telecommunications , physics , voltage , optics , mathematical analysis , mathematics