Open AccessA Low Power/Low Voltage Electrostatic Actuator for RF MEMS Applications
Author(s) -
Jun Yao,
S. Park,
R.J. Anderson,
J.F. DeNatale
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.60
Subject(s) - materials science , microelectromechanical systems , capacitor , optoelectronics , voltage , parasitic extraction , low voltage , actuator , silicon , electrical engineering , engineering
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