Open AccessA Low Power/Low Voltage Electrostatic Actuator for RF MEMS Applications
Author(s) -
J.J. Yao,
S. Park,
R.J. Anderson,
J.F. DeNatale
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.60
Subject(s) - low voltage , microelectromechanical systems , actuator , low power electronics , voltage , electrical engineering , ultra low power , power (physics) , radio frequency , electronic engineering , materials science , computer science , optoelectronics , engineering , physics , power consumption , quantum mechanics