Open AccessSiC Resonant Devices for High Q and High Temperature Applications
Author(s) -
S. Roy,
A. K. McIlwain,
Russell G. DeAnna,
Aaron J. Fleischman,
Ravi K. Burla,
C.A. Zorman,
Mehran Mehregany
Publication year - 2000
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.6
Subject(s) - materials science , optoelectronics , engineering physics , computer science , physics