Open AccessSiC Resonant Devices for High Q and High Temperature Applications
Author(s) -
Sébastien Roy,
A.K. McIlwain,
Russell G. DeAnna,
Aaron J. Fleischman,
Ravi K. Burla,
Christian A. Zorman,
Mehran Mehregany
Publication year - 2000
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2000.6
Subject(s) - materials science , silicon carbide , ceramic , torr , surface micromachining , substrate (aquarium) , silicon , optoelectronics , crystallite , composite material , metallurgy , fabrication , physics , medicine , oceanography , alternative medicine , pathology , thermodynamics , geology
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